✦ LIBER ✦
Two kinds of defect centers observed in sin films prepared by ECR plasma CVD method
✍ Scribed by T. Izumi; M. Shibuya; T. Matsumori; T. Hirao; T. Kamada
- Book ID
- 113280171
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 349 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0168-583X
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