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Two-dimensional stress measurement of a micromachined piezoresistive structure with micro-Raman spectroscopy

✍ Scribed by J. Qian; T.-X. Yu; Y.-P. Zhao

Publisher
Springer-Verlag
Year
2005
Tongue
English
Weight
452 KB
Volume
11
Category
Article
ISSN
0946-7076

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Micro-Raman spectroscopy allows one to measure stress in crystalline materials. The method is nondestructive and provides microscopic lateral resolution. In this paper we show that resonance excitation using an ultraviolet (UV) laser line strongly enhances the depth resolution in micro-Raman spectro