✦ LIBER ✦
Two-dimensional profile of emissive species in a magnetized SiH4/Ar glow discharge for the scanning-plasma CVD method
✍ Scribed by Kawasaki, H.; Matsuda, Y.; Fujiyama, H.
- Book ID
- 117861978
- Publisher
- IEEE
- Year
- 1991
- Tongue
- English
- Weight
- 702 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0093-3813
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