✦ LIBER ✦
Two-Dimensional Patterning of Flexible Designs with High Half-Pitch Resolution by Using Block Copolymer Lithography
✍ Scribed by Toru Yamaguchi; Hiroshi Yamaguchi
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 280 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0935-9648
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