Two-dimensional nature of diffused layers and certain limitations in scaling-down coplanar structure

✍ Scribed by Iwai, H.; Taniguchi, K.; Konaka, M.; Maeda, S.; Nishi, Y.

• Book ID: 114594066
• Publisher: IEEE
• Year: 1982
• Tongue: English
• Weight: 631 KB
• Volume: 29
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1982.20754