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Two-dimensional modeling of a micro-cell plasma in Xe driven by high frequency

✍ Scribed by Kurihara, M.; Makabe, T.

Book ID: 114558840
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 236 KB
Volume: 27
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.799815

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