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Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering

✍ Scribed by S. K. Gokce; S. Holmstrom; C. Hibert; S. Olcer; D. Bowman; H. Urey

Book ID: 126740964
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 388 KB
Volume: 20
Category: Article
ISSN: 1057-7157
DOI: 10.1109/JMEMS.2010.2090507

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