✦ LIBER ✦
Two-dimensional dopant profiling of silicon with submicron resolution using near field optics on silicon/electrolyte contacts
✍ Scribed by Mustapha Djebbouri; François Bertin; Naziha Kesri; Ahmad Bsiesy
- Book ID
- 108060405
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 498 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0169-4332
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