✦ LIBER ✦
Two-channel spectroscopic polarization modulation ellipsometry: A new technique for the analysis of thin SiO2 films
✍ Scribed by G.E. Jellison Jr.
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 622 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0040-6090
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