Two-channel IR gas sensor with two detectors based on LiTaO3 single-crystal wafer
✍ Scribed by Zhang Wendong; Tan Qiulin; Liu Jun; Xue Chenyang; Xiong Jijun; Chou Xiujian
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 826 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0030-3992
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✦ Synopsis
An infrared (IR) single-element detector based on a lithium tantalate (LiTaO 3 ) single-crystal wafer has been successfully fabricated. The preparation and design of the device are discussed and analyzed in detail. The processing of a thin LiTaO 3 wafer, the characterization of an IR filter window, and the assembly of the wafer and filter are explained. A LiTaO 3 sensor element, a CMOS amplifier, a narrowband filter (which can be selected to operate within the appropriate spectral region), and the read-out circuits are set into a TO-18 vessel. Each TO-18-type detector offers a single channel (a single detection wavelength). Two TO-18 detectors with different filters, one acting as a detection channel and the other as a reference, a broadband light source, a circuit board and a flake of wire gauze are assembled and integrated into a gilded gas cell for the purpose of detecting ethene gas.