✦ LIBER ✦
Two-axis-of-rotation drive system in electron-beam lithography apparatus for nanotechnology applications
✍ Scribed by K. Yamazaki; H. Namatsu
- Book ID
- 113797578
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 945 KB
- Volume
- 73-74
- Category
- Article
- ISSN
- 0167-9317
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