✦ LIBER ✦
Tunneling oxide engineering by ion implantation of nitrogen for 3D vertical silicon pillar SONOS flash memory
✍ Scribed by Jae-Sub Oh; Seong-Dong Yang; Sang-Youl Lee; Young-Su Kim; Min-Ho Kang; Sung-Kyu Lim; Hi-Deok Lee; Ga-Won Lee
- Book ID
- 119324774
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 585 KB
- Volume
- 103
- Category
- Article
- ISSN
- 0167-9317
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