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Tuning the quality factor of bulk micromachined structures using squeezed-film damping

✍ Scribed by C.-C. Cheng; W. Fang

Book ID: 106184756
Publisher: Springer-Verlag
Year: 2005
Tongue: English
Weight: 667 KB
Volume: 11
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-004-0457-5

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