Tungsten silicide formation from sequentially sputtered tungsten and silicon films

✍ Scribed by J.M. Molarius; S. Franssila; G. Drozdy; J. Saarilahti

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 593 KB
• Volume: 53
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(91)90290-z