✦ LIBER ✦
Tungsten-rhenium alloys as diffusion barriers between aluminum and silicon: S E Hörnström et al, J Vac Sci Technol, A6, 1988, 1650–1655
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 154 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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