✦ LIBER ✦
Tungsten Allylimido Complexes Cl 4 (RCN)W(NC 3 H 5 ) as Single-Source CVD Precursors for WN x C y Thin Films. Correlation of Precursor Fragmentation to Film Properties
✍ Scribed by Bchir, Omar J.; Green, Kelly M.; Ajmera, Hiral M.; Zapp, Elizabeth A.; Anderson, Timothy J.; Brooks, Benjamin C.; Reitfort, Laurel L.; Powell, David H.; Abboud, Khalil A.; McElwee-White, Lisa
- Book ID
- 127284002
- Publisher
- American Chemical Society
- Year
- 2005
- Tongue
- English
- Weight
- 499 KB
- Volume
- 127
- Category
- Article
- ISSN
- 0002-7863
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