✦ LIBER ✦
Tunable UV-flash krypton lamp array useful for large area deposition and in situ UV annealing of Si-based dielectrics
✍ Scribed by J. Flicstein; Y. Vitel; O. Dulac; C. Debauche; Y.I. Nissim; C. Licoppe
- Book ID
- 103617295
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 591 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0169-4332
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