✦ LIBER ✦
Tunable two-mirror interference lithography system for wafer-scale nanopatterning
✍ Scribed by Mao, Weidong; Wathuthanthri, Ishan; Choi, Chang-Hwan
- Book ID
- 115435144
- Publisher
- Optical Society of America
- Year
- 2011
- Tongue
- English
- Weight
- 383 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0146-9592
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