Tunable radio frequency MEMS inductors with thermal bimorph actuators

✍ Scribed by Zine-El-Abidine, Imed; Okoniewski, Michal; McRory, John G

• Book ID: 125809748
• Publisher: Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 564 KB
• Volume: 15
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/15/11/010