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Trisneopentylgallium as a precursor for atomic layer epitaxy of GaAs

✍ Scribed by P. Yeo; R. Arès; S. P. Watkins; G. A. Horley; P. O’Brien; A. C. Jones

Book ID: 107457440
Publisher: Springer US
Year: 1997
Tongue: English
Weight: 102 KB
Volume: 26
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-997-0015-x

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