✦ LIBER ✦
Trimethylsilylcyclopentadienyl tris(dimethylamino)zirconium as a single-source metal precursor for the atomic layer deposition of ZrxSi1-xO4
✍ Scribed by Chung, Yoon Jang; Moon, Dae-Chul; Han, Jeong Hwan; Park, Mira; Park, Jung Woo; Chung, Taek-Mo; Lee, Young Kuk; An, Ki Seok
- Book ID
- 124110596
- Publisher
- Elsevier Science
- Year
- 2014
- Tongue
- English
- Weight
- 668 KB
- Volume
- 564
- Category
- Article
- ISSN
- 0040-6090
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