Tribologische Sub-Mikrometer Schichten für Mikrosysteme. Tribological sub-micron coatings for microsystems

✍ Scribed by Ralf Bandorf; Holger Lüthje

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 434 KB
• Volume: 14
• Category: Article
• ISSN: 0947-076X
• DOI: 10.1002/1522-2454(200204)14:2<87::aid-vipr87>3.0.co;2-t