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Tribological study of cubic boron nitride film

✍ Scribed by S. Miyake; S. Watanabe; M. Murakawa; R. Kaneko; T. Miyato


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
500 KB
Volume
212
Category
Article
ISSN
0040-6090

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We present low stress cubic boron nitride (cBN) films with a transition layer deposited on the metal alloy substrates by tuned substrate radio-frequency magnetron sputtering. The films were characterized by Fourier transform infrared spectroscopy and transmission electron microscopy (TEM). The IR pe