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Trap distribution in thin diamond-like carbon films

โœ Scribed by Staryga, E.


Book ID
122896053
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
241 KB
Volume
3
Category
Article
ISSN
0925-9635

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Ion irradiation effects on diamond and diamond like carbon (DLC) films have attracted great interest in recent years. DLC films contain varying amounts of hydrogen attached to carbon. Irradiation leads to hydrogen loss, increase or decrease of both sp3 and sp' bonded sites, changes in bond angle dis