𝔖 Bobbio Scriptorium
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Transport properties of polycrystalline tin oxide films

✍ Scribed by A. Antonaia; P. Menna; M.L. Addonizio; M. Crocchiolo

Book ID
108029079
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
345 KB
Volume
28
Category
Article
ISSN
0927-0248

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Polycrystalline conducting, ca. 250 nm thick indium tin oxide (ITO) and indium oxide (IO) films grown on SiO 2 /Si substrates using reactive magnetron sputtering, have been implanted with 1 and 5 at.% of Mn, followed by annealing in nitrogen or in vacuum. The effect of the post-growth treatment on t