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Transparent ZnO thin film transistor fabricated by sol-gel and chemical bath deposition combination method

✍ Scribed by Cheng, Hua-Chi; Chen, Chia-Fu; Tsay, Chien-Yie


Book ID
121231290
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
545 KB
Volume
90
Category
Article
ISSN
0003-6951

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Thin films of intrinsic and Al-doped ZnO were prepared by the sol-gel technique associated with spin coating onto glass substrates. Zinc acetate dehydrate, ethanol and monoethanolamine were used as a starting material, solvent and stabiliser, respectively. Structural, electrical and optical characte