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Transparent and conducting Zn-Sn-O thin films prepared by combinatorial approach

✍ Scribed by J.H. Ko; I.H. Kim; D. Kim; K.S. Lee; T.S. Lee; B. Cheong; W.M. Kim

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
965 KB
Volume
253
Category
Article
ISSN
0169-4332

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## Abstract Ga–Sn–Zn–O (GTZO) thin films were prepared on glass substrates at 100 °C by co‐sputtering of Ga‐doped ZnO and SnO~2~ targets. Characteristic properties of the films were investigated with varying oxygen gas content in the sputtering ambient. Whereas amorphous GTZO films were prepared wi