Microstructuring of UV-transparent funct
โ
T. Rudolph; K. Zimmer; T. Betz
๐
Article
๐
2006
๐
Elsevier Science
๐
English
โ 559 KB
KrF excimer laser irradiation was used to remove organic moieties from UV-transparent films of organosilanes on borosilicate glass. Highresolution patterns with different functional groups on glass were obtained by a combination of laser modification and silanisation steps. The local material modifi