Transmission electron microscopy observations of lowtemperature ion implanted (100) silicon : M. Servidori and I. Vecchi. Solid-St. Electron.24, 329 (1981)

• Book ID: 107829264
• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 126 KB
• Volume: 21
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(81)90227-4