✦ LIBER ✦
Transmission Electron Microscopy Observation of CMOS Devices of Titanium Self-Aligned Silicide Technology with Nitrogen (N+) Implantation Process
✍ Scribed by Y. M. Jia; C. W. Lim; A. J. Bourdillon; C. Boothroyd
- Book ID
- 110239573
- Publisher
- Springer
- Year
- 1999
- Tongue
- English
- Weight
- 107 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0261-8028
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