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Transmission electron microscopy characterization of the erbium silicide formation process using a Pt/Er stack on a silicon-on-insulator substrate

✍ Scribed by A. ŁASZCZ; J. KĄTCKI; J. RATAJCZAK; XIAOHUI TANG; E. DUBOIS


Book ID
108864244
Publisher
John Wiley and Sons
Year
2006
Tongue
English
Weight
129 KB
Volume
224
Category
Article
ISSN
0022-2720

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