✦ LIBER ✦
Transmission electron microscope study of surface steps on SiGe/Si(001) superlattices produced by differential etching
✍ Scribed by Y. Atici; D. Cherns
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 799 KB
- Volume
- 154
- Category
- Article
- ISSN
- 0022-0248
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