✦ LIBER ✦
Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence in SiGe
✍ Scribed by C. Huyghebaert; B. Brijs; T. Janssens; W. Vandervorst
- Book ID
- 108417832
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 141 KB
- Volume
- 203-204
- Category
- Article
- ISSN
- 0169-4332
No coin nor oath required. For personal study only.