Transient and quasi-stationary simulation of heat and mass transfer in Czochralski silicon crystal growth

✍ Scribed by A. Voigt; C. Weichmann; J. Nitschkowski; E. Dornberger; R. Hölz

• Publisher: John Wiley and Sons
• Year: 2003
• Tongue: English
• Weight: 228 KB
• Volume: 38
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.200310063