✦ LIBER ✦
Trace surface analysis: 30 ppb analysis with removal of less than a monolayer. Fe and Ti impurities in the first atomic layer of Si wafers
✍ Scribed by M.J. Pellin; C.E. Young; W.F. Calaway; D.M. Gruen
- Book ID
- 113277970
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 551 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0168-583X
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