Trace element determination of high-purity chemicals for the processing of semiconductors with high-resolution ICP-mass spectrometry using stable isotope dilution analysis (IDA)

✍ Scribed by J. Dahmen; M. Pfluger; M. Martin; L. Rottmann; G. Weichbrodt

• Publisher: Springer
• Year: 1997
• Tongue: English
• Weight: 34 KB
• Volume: 359
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/s002160050599