TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer

[IEEE IEEE Thirteenth Annual Internation

[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Monolithic integrated surface micromachined pressure sensors with analog on-chip linearization and temperature compensation

✍ Trieu, H.K.; Knier, M.; Koster, O.; Kappert, H.; Schmidt, M.; Mokwa, W. 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 290 KB

The IEEE Conference on Micro Electro Mechanical Systems (MEMS) is one of the industry's most exciting meetings focused on interdisciplinary research topics on micro electro mechanical devices and systems fabricated on the micrometer to millimeter scale.