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Towards ultra-dense arrays of VHF NEMS with FDSOI-CMOS active pixels for sensing applications

✍ Scribed by Arndt, Gregory; Dupre, Cecilia; Arcamone, Julien; Cibrario, Gerald; Rozeau, Olivier; Duraffourg, Laurent; Ollier, Eric; Colinet, Eric


Book ID
111877018
Publisher
IEEE
Year
2012
Weight
260 KB
Series
undefined series for scimag
Volume
0
Category
Article

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