✦ LIBER ✦
Towards the use of the conformal-evaporated-film-by-rotation technique in fabricating microelectronic circuits and microsystems
✍ Scribed by R.J. Martín-Palma; C.G. Pantano; A. Lakhtakia
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 335 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0026-2714
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