Toward the fast deposition of highly crystallized microcrystalline silicon films with low defect density for Si thin-film solar cells

✍ Scribed by Haijun Jia; Jhantu K. Saha; Naoyuki Ohse; Hajime Shirai

• Book ID: 116669126
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 338 KB
• Volume: 352
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/j.jnoncrysol.2005.12.032