✦ LIBER ✦
Toward Environmentally Friendly Photolithographic Materials: A New Class of Water-Soluble Photoresists
✍ Scribed by Yamada, Shintaro; Mrozek, Thomas; Rager, Timo; Owens, Jordan; Rangel, Jose; Willson, C. Grant; Byers, Jeffery
- Book ID
- 126330213
- Publisher
- American Chemical Society
- Year
- 2004
- Tongue
- English
- Weight
- 223 KB
- Volume
- 37
- Category
- Article
- ISSN
- 0024-9297
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