Total TCAD strategy for DFM in IC technology development

✍ Scribed by Walton, A.J.; Fallon, M.; Newsam, M.I.; Ferguson, R.S.; Sprevak, D.; Elliott, J.P.; Allan, G.A.

• Book ID: 114456918
• Publisher: The Institution of Electrical Engineers
• Year: 1997
• Tongue: English
• Weight: 763 KB
• Volume: 144
• Category: Article
• ISSN: 1350-2344
• DOI: 10.1049/ip-smt:19970860