Total and Partial Pressure Measurement in Vacuum Systems

✍ Scribed by J. H. Leck (auth.)

Publisher: Springer US
Year: 1989
Tongue: English
Leaves: 208
Edition: 1
Category: Library

No coin nor oath required. For personal study only.

✦ Synopsis

This book deals with the underlying theory and practical aspects of pressure gauges that are at present in general use. Because of the ever-increasing demands to provide a wider range of sophisticated and reliable vacuum equipment a good understanding of these instruments is of vital importance to all workers in the research and industrial sectors. Of the gauges considered only the mechanical types are absolute, in the sense that they measure pressure directly as a force upon a liquid column or a solid surface. Under ideal conditions it is possible to calculate their sensitiv ities, which are the same for all gases and vapours. The recent developments in the viscous or molecular damping gauges indicate that these may also be considered absolute. Other gauges are indirect in that they involve the measurement of some secondary phenomenon which is pressure-dependent and therefore these gauges can only be used for measurement after calibration against an absolute standard. The radiometer or Knudsen type gauge has been excluded from the text since these are now only of historic interest. Also no mention is made of the integration techniques involving surface changes (such as work function) although these could have application under very special circumstances. The McLeod gauge is dealt with in some detail, for even though this gauge has few practical applications, it is the most sensitive absolute gauge available and has value as a reference standard.

✦ Table of Contents

Front Matter....Pages i-vi
Mechanical manometers....Pages 1-38
Thermal conductivity gauges....Pages 39-67
Thermionic cathode ionization gauges....Pages 68-115
Cold-cathode ionization gauges....Pages 116-124
Gauge calibration....Pages 125-137
Gas analysis in vacuum systems: magnetic, crossed-field and time-of-flight analysers....Pages 138-154
Gas analysis in vacuum systems: quadrupole mass analysers....Pages 155-192
Back Matter....Pages 193-201