Torr plan film thickness monitor: Bir-Vac Ltd, UK Circle number 48 on Reader Enquiry Service card

• Publisher: Elsevier Science
• Year: 1968
• Tongue: English
• Weight: 338 KB
• Volume: 18
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(68)90164-4