✦ LIBER ✦
Topological effects regarding trench structures covered with LPCVD and PECVD thin films
✍ Scribed by J. Schlote; S. Hinrich; B. Kuck; K.-W. Schröder
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 532 KB
- Volume
- 59
- Category
- Article
- ISSN
- 0257-8972
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