✦ LIBER ✦
Top-down fabrication of very-high density vertically stacked silicon nanowire arrays with low temperature budget
✍ Scribed by Michael Zervas; Davide Sacchetto; Giovanni De Micheli; Yusuf Leblebici
- Book ID
- 113797871
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 874 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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