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Top down fabricated silicon nanowire networks for thermoelectric applications

✍ Scribed by Totaro, M.; Bruschi, P.; Pennelli, G.

Book ID
121723984
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
536 KB
Volume
97
Category
Article
ISSN
0167-9317

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## Abstract We describe the fabrication, electrical and electrochemical characterization of silicon nanowire arrays, which were processed in a top‐down approach using combined nanoimprint lithography and wet chemical etching. We used the top silicon layer as contact line and observed an influence o