Tool capacity planning for semiconductor fabrication facilities under demand uncertainty

✍ Scribed by Jayashankar M. Swaminathan

• Book ID: 108445499
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 206 KB
• Volume: 120
• Category: Article
• ISSN: 0377-2217
• DOI: 10.1016/s0377-2217(98)00389-0