✦ LIBER ✦
Tolerancing of diffraction-limited Kirkpatrick–Baez synchrotron beamline optics for extreme-ultraviolet metrology
✍ Scribed by Naulleau, Patrick P. ;Goldberg, Kenneth A. ;Batson, Phillip J. ;Jeong, Seongtae ;Underwood, James H.
- Book ID
- 115349443
- Publisher
- The Optical Society
- Year
- 2001
- Tongue
- English
- Weight
- 285 KB
- Volume
- 40
- Category
- Article
- ISSN
- 1559-128X
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