✦ LIBER ✦
ToF-SIMS nitrogen profiles in oxynitride thin films: correlation with XPS bonding configurations
✍ Scribed by E. Ravizza; S. Spadoni; S. Grasso; M. E. Vitali; C. De Marco; G. Ghidini
- Book ID
- 115562054
- Publisher
- John Wiley and Sons
- Year
- 2012
- Tongue
- English
- Weight
- 162 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0142-2421
- DOI
- 10.1002/sia.5153
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